JPH0648157Y2 - 分子ポンプの駆動装置 - Google Patents

分子ポンプの駆動装置

Info

Publication number
JPH0648157Y2
JPH0648157Y2 JP17066388U JP17066388U JPH0648157Y2 JP H0648157 Y2 JPH0648157 Y2 JP H0648157Y2 JP 17066388 U JP17066388 U JP 17066388U JP 17066388 U JP17066388 U JP 17066388U JP H0648157 Y2 JPH0648157 Y2 JP H0648157Y2
Authority
JP
Japan
Prior art keywords
inverter
rotor
induction motor
molecular pump
control means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17066388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0292092U (en]
Inventor
修 芦田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP17066388U priority Critical patent/JPH0648157Y2/ja
Publication of JPH0292092U publication Critical patent/JPH0292092U/ja
Application granted granted Critical
Publication of JPH0648157Y2 publication Critical patent/JPH0648157Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP17066388U 1988-12-30 1988-12-30 分子ポンプの駆動装置 Expired - Lifetime JPH0648157Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17066388U JPH0648157Y2 (ja) 1988-12-30 1988-12-30 分子ポンプの駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17066388U JPH0648157Y2 (ja) 1988-12-30 1988-12-30 分子ポンプの駆動装置

Publications (2)

Publication Number Publication Date
JPH0292092U JPH0292092U (en]) 1990-07-20
JPH0648157Y2 true JPH0648157Y2 (ja) 1994-12-07

Family

ID=31461802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17066388U Expired - Lifetime JPH0648157Y2 (ja) 1988-12-30 1988-12-30 分子ポンプの駆動装置

Country Status (1)

Country Link
JP (1) JPH0648157Y2 (en])

Also Published As

Publication number Publication date
JPH0292092U (en]) 1990-07-20

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